Semiconductor machine table electrostatic chuck base disassembling and assembling jig

• Main Authors: JIA PENGKUAN, CAI XIANG, CHEN WEIGUO, SUN XIAOGUANG
• Format: Patent
• Language: Chinese; English
• Published: 03.01.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FORFASTENING, CONNECTING, DISENGAGING OR HOLDING; TRANSPORTING

The utility model relates to a semiconductor machine table electrostatic chuck base disassembling and assembling jig which comprises an auxiliary jig screw (1), a positioning pin (2), a handle (3) and a ceramic ejector pin preformed hole (4). Wherein the whole disassembling and assembling jig body is arranged in a flat disc shape, the handles (3) are arranged at the upper end and the lower end of the disassembling and assembling jig body, the auxiliary jig screws (1) are arranged on the left side and the right side of the disassembling and assembling jig body, and the ceramic ejector pin preformed holes (4) are formed in the periphery of the center of the disassembling and assembling jig body; and three positioning pins (2) are also included. The jig is simple and practical, the jig body is made of Teflon materials, the electrostatic chuck base and the pushed ceramic ejector pin can be effectively protected, and the electrostatic chuck is prevented from being collided and the ceramic ejector pin is prevented