Silicon wafer degumming machine

The utility model provides a silicon wafer degumming machine, which comprises a degumming mechanism, which comprises a feeding groove, a spraying groove, a first degumming groove, a second degumming groove and a discharging groove which are arranged in sequence, and a degumming solution is stored in...

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Bibliographic Details
Main Authors AN BAOZHEN, CAO SHAOWEN, LIU SHUNLIANG, MENG RUI
Format Patent
LanguageChinese
English
Published 27.12.2022
Subjects
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Summary:The utility model provides a silicon wafer degumming machine, which comprises a degumming mechanism, which comprises a feeding groove, a spraying groove, a first degumming groove, a second degumming groove and a discharging groove which are arranged in sequence, and a degumming solution is stored in the first degumming groove and the second degumming groove; the moving mechanism comprises a sliding rail and a moving sliding block, the sliding rail is arranged on the outer side of the degumming mechanism, and the moving sliding block is connected with the sliding rail; the vertical telescopic mechanism comprises a first vertical rod and a second vertical rod, the first vertical rod is fixedly connected with the movable sliding block, and the second vertical rod can stretch out and draw back; the transverse telescopic mechanism comprises a first transverse rod and a second transverse rod, the first transverse rod is connected with the second vertical rod, and the second transverse rod can stretch out and draw b
Bibliography:Application Number: CN202221966044U