Detection device for simultaneously measuring straightness error and position

• Main Authors: GUO GANGXIANG, GUO BIN, CHEN NING, XIE HAO, WANG CHAO
• Format: Patent
• Language: Chinese; English
• Published: 11.11.2022
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The utility model relates to a detection device for simultaneously measuring straightness error and position. The detection device comprises a control end, and a double-frequency laser, a polarizing beam splitter, a common beam splitter, a semi-transparent semi-reflecting mirror, a Wollaston prism and a double-rectangular prism which are arranged in sequence, a first polaroid and a first photoelectric detector are sequentially arranged on one side of the polarizing beam splitter; a second polaroid and a second photoelectric detector are sequentially arranged on one side of the common spectroscope, and a quarter-wave plate and a reflector are sequentially arranged on the other side of the common spectroscope; the semi-transparent semi-reflecting mirror and the Wollaston prism are combined to serve as a mobile measuring mirror; a half-wave plate, a polarizing beam splitter and a third photoelectric detector are sequentially arranged on the same side of the Wollaston prism for receiving transmission light emitte