Target material recovery system

• Main Authors: REN MINXIN, ZHU YUANKANG, WANG CHEN, WU XIAOWEI, TAO YI
• Format: Patent
• Language: Chinese; English
• Published: 08.11.2022
• Subjects: CHEMISTRY; FERROUS OR NON-FERROUS ALLOYS; METALLURGY; PRETREATMENT OF RAW MATERIALS; PRODUCTION AND REFINING OF METALS; TREATMENT OF ALLOYS OR NON-FERROUS METALS

The utility model provides a target material recovery system, and belongs to the field of photovoltaic solar cell manufacturing. The target material recycling system comprises a conveying mechanism and a target material recycling device, the conveying mechanism comprises a target material coating station and a target material recycling station, and the target material recycling station is arranged on the downstream of the target material coating station; the target material recycling device comprises a collector, a vacuum generator and a storage device, the collector is arranged at the target material recycling station and used for collecting the target materials in a negative pressure mode, the vacuum generator is used for vacuumizing the collector to provide negative pressure, and the storage device is used for storing the target materials. Therefore, the cleanliness and the product yield of the carrier plate are ensured. 本申请提供一种靶材回收系统，属于光伏太阳能电池制造领域。靶材回收系统包括传输机构以及靶材回收装置，传输机构包括靶材镀膜工位和靶材回收工位，靶材回收工位设置于靶材镀膜工位的下