Space-based internal covering extreme ultraviolet off-axis two-reflection imaging system

• Main Authors: BYUN EUN-WOOK, KONG QINGQING, ZHU RIHONG, SHEN HUA, JIAO KERONG, ZHANG MINGDONG
• Format: Patent
• Language: Chinese; English
• Published: 04.10.2022
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The utility model provides a space-based internal-covering extreme ultraviolet off-axis double-reflector imaging system. The space-based internal-covering extreme ultraviolet off-axis double-reflector imaging system comprises an aperture diaphragm, a main reflector, an internal-covering diaphragm, a slit plate, a secondary mirror and a CMOS (complementary metal oxide semiconductor) detector which are sequentially arranged along a light path, light of a detected target sequentially passes through the main reflector, the inner covering type diaphragm, the slit plate and the secondary mirror and then is imaged on the CMOS detector. The surface type of the primary reflector is an off-axis parabolic mirror, an inner covering type diaphragm and a slit plate are placed on the focal plane of the primary reflector, the secondary reflector adopts an elliptical grating which is formed by combining an elliptical surface with a polynomial aspheric item and a grating with a notch groove, and the secondary reflector has the