Gas sensor chip based on NDIR principle

• Main Authors: YANG SHAOSONG, LIU TONGQING, CAO JINYUN
• Format: Patent
• Language: Chinese; English
• Published: 30.09.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The utility model provides a gas sensor chip based on an NDIR (Non-Dispersive Infra-Red) principle, which is structurally provided with a heat conduction layer and a black light absorption layer with a roughened top surface, so that the absorption of infrared radiation energy by the chip is increased, the output performance of the chip is improved, and the gas detection sensitivity of the whole sensor is further improved. A thermocouple pile, a positive electrode and a negative electrode are arranged on the upper surface of the substrate, and the positive electrode and the negative electrode are respectively connected with the thermocouple pile through metal wires; the device is characterized in that the upper surface of the thermocouple pile is provided with a top oxide layer, the upper surface of the top oxide layer is provided with a silicon nitride absorption passivation layer, and the silicon nitride absorption passivation layer is connected with each upper thermocouple of the thermocouple pile through a