Wafer detection device

• Main Authors: MA XUECHAO, ZHOU LINKUN, LIN MIAO, LIU ZHONGHAI
• Format: Patent
• Language: Chinese; English
• Published: 27.09.2022
• Subjects: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PHYSICS; TESTING; TRANSPORTING

The utility model discloses a wafer detection device, and belongs to the technical field of wafer detection. The wafer detection device comprises an operation table, an X moving mechanism, a Y moving mechanism, a moving platform, a detection jig, a lower detection mechanism and an upper detection mechanism. The X moving mechanism is arranged on the operation table, and the Y moving mechanism is arranged on the X moving mechanism. The moving platform is arranged on the Y moving mechanism, a mounting hole is formed in the moving platform, the detection jig comprises a transparent suction cup and a carrying ring, the carrying ring is arranged in the mounting hole, the transparent suction cup is fixed in a through hole of the carrying ring, a vacuum flow channel is arranged on the top surface of the transparent suction cup, the vacuum flow channel is connected with a negative pressure device, and the vacuum flow channel comprises a linear first flow channel; the first flow channel is arranged along the radial dir