Novel wafer ejector pin device

• Main Authors: TIAN SONG, YANG CONGBIN
• Format: Patent
• Language: Chinese; English
• Published: 16.09.2022
• Subjects: PERFORMING OPERATIONS; TRANSPORTING; WORKING CEMENT, CLAY, OR STONE; WORKING STONE OR STONE-LIKE MATERIALS

The utility model relates to a novel wafer ejector pin device, which comprises an ejector pin seat and an ejector pin mechanism arranged in the ejector pin seat, wherein the ejector pin mechanism comprises three ejector pins, each ejector pin comprises an ejector rod and an ejector tip connected with the ejector rod, each ejector tip comprises a tip end, and the tip ends of the ejector tips of the three ejector pins are located on the same plane and form a triangle on the plane. According to the utility model, the 3pin ejector pin is used for replacing a 1pin ejector pin, the problem of consumable scrap cost caused by abrasion or pin breakage of the 1pin ejector pin due to single-point stress is solved, the contact surface of the three ejector pins is designed to be three points, which is equivalent to triangular surface contact, and the condition that the grabbed crystal is inclined when the position of the platform is slightly shifted is solved. 本实用新型涉及一种新型的晶圆顶针装置，包括顶针座、安装于顶针座内的顶针机构；其中，所述顶针机构包括三根顶针，每个顶针包括顶杆