Automatic feeding slit type spraying device

• Main Authors: CHEN GANGBIAO, HUANG ZHAOFENG, YOU YI, CHEN XUEZHI
• Format: Patent
• Language: Chinese; English
• Published: 06.09.2022
• Subjects: APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; ATOMISING APPARATUS; NOZZLES; PERFORMING OPERATIONS; SPRAYING APPARATUS; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

The utility model belongs to the technical field of semiconductor processing equipment, and particularly relates to an automatic feeding slit type spraying device which comprises a gantry support and nozzles. The lifting bottom plate is arranged on the gantry support, the lifting motor is arranged o...