Automatic feeding slit type spraying device

The utility model belongs to the technical field of semiconductor processing equipment, and particularly relates to an automatic feeding slit type spraying device which comprises a gantry support and nozzles. The lifting bottom plate is arranged on the gantry support, the lifting motor is arranged o...

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Bibliographic Details
Main Authors CHEN GANGBIAO, HUANG ZHAOFENG, YOU YI, CHEN XUEZHI
Format Patent
LanguageChinese
English
Published 06.09.2022
Subjects
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
ATOMISING APPARATUS
NOZZLES
PERFORMING OPERATIONS
SPRAYING APPARATUS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
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Summary:The utility model belongs to the technical field of semiconductor processing equipment, and particularly relates to an automatic feeding slit type spraying device which comprises a gantry support and nozzles. The lifting bottom plate is arranged on the gantry support, the lifting motor is arranged on the lifting bottom plate, the lifting support is connected with an output shaft of the lifting motor, and the two sets of crossed roller sliding rails are arranged on the back face of the lifting support. The linear module is horizontally placed, the motor is arranged at the rear end of the linear module, the supporting plate bottom plate is arranged on the upper surface of the linear module and can reciprocate in the horizontal direction relative to the linear module, and the supporting plate is arranged on the upper surface of the supporting plate bottom plate and used for placing a chip carrier. The nozzle is arranged on the lower surface of the lifting support and fixedly connected with the lifting support. A
Bibliography:Application Number: CN202123340938U