Integrated nitrogen purging module and dry vacuum pump

• Main Authors: ZHOU XIANZHONG, HE JIANXIU, HOU YALYU, YOU SHIQI, CHEN SHAOFEI, ZHOU YANG, NIE XIAOBO, LIU TAO, SHEN WENWU
• Format: Patent
• Language: Chinese; English
• Published: 23.08.2022
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS; WEAPONS

The embodiment of the utility model provides an integrated nitrogen purging module and a dry vacuum pump, and relates to the technical field of semiconductors. The integrated nitrogen purging module comprises a module body, an air inlet one-way valve, a pressure reducing valve and a main path electromagnetic valve, the air inlet one-way valve, the pressure reducing valve and the main path electromagnetic valve are mounted on the module body, an air channel is formed in the module body, a plurality of air outlets communicated with the air channel are further formed in the module body, a flow limiting screw is mounted in each air outlet, and the air inlet one-way valve is used for being connected with a nitrogen source. The air inlet one-way valve, the pressure reducing valve, the main path electromagnetic valve and the air outlet are sequentially communicated. The integrated nitrogen purging module can conduct nitrogen purging on multiple positions on the pump body, the nitrogen flow of each position can be fl