Temperature measuring device and semiconductor machine

• Main Authors: ZHU HONGBO, TAO ZHUO, HUANG JIAMING
• Format: Patent
• Language: Chinese; English
• Published: 09.08.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model provides a temperature measuring device and a semiconductor machine. The temperature measuring device comprises a first motion unit, a second motion unit and a temperature sensor. The first movement unit is overlapped on the second movement unit in a crossed manner, and a sliding block of the second movement unit is connected with a base of the first movement unit; the temperature sensor is arranged on the sliding block of the first motion unit. Therefore, the temperature sensor not only can be driven by the sliding block of the first movement unit to move along the axial direction of the rotating piece in the first movement unit, but also can be driven by the sliding block of the second movement unit to move along the axial direction of the rotating piece in the second movement unit, so that the temperature sensor can move in a two-degree-of-freedom plane. Compared with fixed point detection, the temperature measuring device is wider in detection range, can detect the temperature condition