Supporting device

The utility model provides a supporting device, which comprises a driving component, a supporting component and a supporting component, the driving component comprises a stator structure and a mover structure, and the mover structure is movably arranged relative to the stator structure along the ext...

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Bibliographic Details
Main Authors JIANG XUCHU, TANG YANWEN, PENG RENQIANG, YUAN JIAXIN
Format Patent
LanguageChinese
English
Published 02.08.2022
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
GENERATION
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Summary:The utility model provides a supporting device, which comprises a driving component, a supporting component and a supporting component, the driving component comprises a stator structure and a mover structure, and the mover structure is movably arranged relative to the stator structure along the extension direction of a preset axis; the guide shaft is arranged in the stator structure and the rotor structure in a penetrating manner, and the central axis of the guide shaft coincides with a preset axis; the guide shaft is fixedly connected with the rotor structure and is movably arranged relative to the stator structure along the extension direction of the preset axis; the rotor structure is connected with the supporting part so as to drive the supporting part to move, and the supporting part is used for supporting a silicon wafer. According to the supporting device, the guiding shaft is arranged in the stator structure and the rotor structure in a penetrating mode, the overall structure of the supporting device
Bibliography:Application Number: CN202123005462U