Device for detecting lineation residues or edge snapping residues

• Main Authors: SUN ANDONG, SHEN JINYU
• Format: Patent
• Language: Chinese; English
• Published: 29.07.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

When the device is used, a light source emitter is fixedly mounted on one side of an inner wall plate of equipment through a mounting and fixing assembly, and a light source signal receiver is fixedly mounted on the other side of the inner wall plate of the equipment through a mounting and fixing assembly. The light source emitter and the light source signal receiver are arranged oppositely, the light source signal receiver is used for receiving light signals emitted by the light source emitter, when substrate production is normal, no glass substrate exists between the light source emitter and the light source signal receiver, and light beams normally reach the signal receiver, and when the substrate is abnormal, and marking residues and edge breaking residues exist, the light beams normally reach the signal receiver. A glass substrate is arranged between the light source and the signal receiver, light beams are refracted, the path of the light beams is changed, the signal receiver cannot receive signals, the