Exhaust fan structure of vacuum evaporator

• Main Author: XUE MENGXIAO
• Format: Patent
• Language: Chinese; English
• Published: 12.07.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model provides an exhaust fan structure of a vacuum evaporator, the exhaust fan structure is arranged between a cavity and an exhaust chamber of the vacuum evaporator, the exhaust fan structure is located at the middle lower part of a rear shield plate of the cavity of the vacuum evaporator, and the exhaust fan structure comprises a frame and an exhaust fan part arranged in the frame; the exhaust fan part comprises a plurality of exhaust pieces arranged in a vertical shutter shape, the exhaust pieces are thin pieces, the exhaust pieces have inclination angles a relative to the vertical face in the front-to-back direction, the inclination angles a of the exhaust pieces are the same or different, and the included angle a between every two adjacent exhaust pieces is larger than the included angle a of the exhaust pieces in the front-to-back direction. And the right side edge of the previous exhaust sheet and the left side edge of the next exhaust sheet have a coincident line or a coincident surface o