Automatic device for cleaning hard glue on surface of wafer

The utility model discloses automatic equipment for cleaning ebonite on the surface of a wafer. The automatic equipment comprises a mounting rack, a feeding storage box, a surface ebonite removing mechanism, a side ebonite removing mechanism, a cleaning mechanism for cleaning the wafer, a visual det...

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Bibliographic Details
Main Author FANG YULONG
Format Patent
LanguageChinese
English
Published 14.06.2022
Subjects
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
POSTAL SORTING
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATING SOLIDS FROM SOLIDS
SORTING
SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTEDPIECE-MEAL, e.g. BY PICKING
TRANSPORTING
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Summary:The utility model discloses automatic equipment for cleaning ebonite on the surface of a wafer. The automatic equipment comprises a mounting rack, a feeding storage box, a surface ebonite removing mechanism, a side ebonite removing mechanism, a cleaning mechanism for cleaning the wafer, a visual detection mechanism for detecting the wafer, a finished product storage box and a manipulator, the manipulator is mounted on the mounting platform of the mounting frame; the feeding storage box, the surface ebonite removing mechanism, the side ebonite removing mechanism, the cleaning mechanism, the visual inspection mechanism and the finished product storage box are arranged around the manipulator in sequence; and the manipulator can carry the wafer to sequentially pass through the surface ebonite removing mechanism, the side ebonite removing mechanism, the cleaning mechanism and the visual inspection mechanism, and conveys the processed wafer into the storage box. According to the utility model, the functions of surf
Bibliography:Application Number: CN202123006958U