Point evaporation source crucible, evaporator and OLED device

• Main Authors: SHEN QIAN, WANG WEIWEI, ZHOU WENBIN, FENG FENG, SUN JIAN, ZHANG FENG, GAO YUDI
• Format: Patent
• Language: Chinese; English
• Published: 03.06.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model relates to the technical field of evaporation processing, in particular to a point evaporation source crucible, an evaporator and an OLED (Organic Light Emitting Diode) device. The point evaporation source crucible comprises a crucible body, a first nozzle and a second nozzle, the...