Point evaporation source crucible, evaporator and OLED device

• Main Authors: SHEN QIAN, WANG WEIWEI, ZHOU WENBIN, FENG FENG, SUN JIAN, ZHANG FENG, GAO YUDI
• Format: Patent
• Language: Chinese; English
• Published: 03.06.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model relates to the technical field of evaporation processing, in particular to a point evaporation source crucible, an evaporator and an OLED (Organic Light Emitting Diode) device. The point evaporation source crucible comprises a crucible body, a first nozzle and a second nozzle, the crucible body is used for containing objects to be evaporated, the first nozzle is arranged on the crucible body, an inner cavity of the first nozzle is communicated with the crucible body, the first nozzle is used for evaporating a first area of a base plate, and the first area extends to the outer edge from the geometric center of the base plate. The base plate horizontally rotates around the geometric center of the base plate, the second nozzle is arranged on the crucible, an inner cavity of the second nozzle is communicated with the crucible, the second nozzle is used for evaporating a second area of the base plate, and the second area is the edge part of the first area. According to the evaporation machine, th