Protective device of wafer turnover mechanism

• Main Author: WANG, STEVEN, HE
• Format: Patent
• Language: Chinese; English
• Published: 05.04.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model discloses a protection device of a wafer turnover mechanism, which relates to the technical field of semiconductor processing, and comprises a limiting device, the limiting device is arranged outside an accommodating box of the wafer turnover mechanism, a wafer box is arranged in the accommodating box, a wafer is arranged in the wafer box, and the limiting device is arranged in the accommodating box. The limiting device can move between a first state and a second state, when the limiting device is in the first state, the limiting device can limit the sliding of the wafer box and limit the wafer from leaving the wafer box, and when the limiting device is in the second state, the wafer box can freely enter and exit from the accommodating box, and the wafer can freely enter and exit from the wafer box. By arranging the limiting device, sliding of the wafer box can be limited, the wafer can be prevented from sliding out of the wafer box, the wafer box and the wafer can be protected in the overtu