Developing equipment

• Main Authors: WANG XIAOLONG, SHI YANFANG, ZHENG HAICHANG, CHEN LIJUN
• Format: Patent
• Language: Chinese; English
• Published: 05.04.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The utility model provides developing equipment. The developing equipment comprises a developing unit and a cleaning liquid supply unit, wherein the developing unit is used for spraying a developing solution to a substrate in a developing cavity through a nozzle so as to carry out developing; and the cleaning solution supply unit is communicated with the nozzle and is used for spraying a cleaning solution through the nozzle after the developing unit finishes developing the substrate so as to remove developing residues adsorbed in the nozzle. The developing equipment provided by the utility model can be used for automatically cleaning developing residues adsorbed on the nozzle after the developing work is finished every time, is efficient and quick, eliminates the capacity loss caused by shutdown for cleaning the nozzle, and is beneficial to improving the production benefit. 本实用新型提供了一种显影设备，包括：显影单元和清洗液供给单元。其中，显影单元，用于通过喷嘴向显影腔体内的基板喷洒显影液以进行显影；清洗液供给单元，与所述喷嘴连通，用于在所述显影单元对所述基板进行显影完成后，将清洗溶液通过所述喷嘴喷洒出，以去除所述喷嘴中吸附的显影残留物。本实