Probe card tray device for probe station

The utility model provides a probe card tray device for a probe station, which comprises a probe card tray placing table and a probe card tray, and is characterized in that the probe card tray comprises a positioning support, and a hollow groove is arranged in the positioning support; wherein the po...

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Bibliographic Details
Main Authors QI YINGFEI, YE HONGBO
Format Patent
LanguageChinese
English
Published 29.03.2022
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:The utility model provides a probe card tray device for a probe station, which comprises a probe card tray placing table and a probe card tray, and is characterized in that the probe card tray comprises a positioning support, and a hollow groove is arranged in the positioning support; wherein the positioning support is provided with a plurality of positioning hole pairs, and each positioning hole pair comprises two positioning holes which are symmetrically formed in the positioning support along the circumference of the hollow groove; the probe card tray placing table is provided with a positioning column pair, the positioning column pair comprises two positioning columns, the positioning columns correspond to the positioning holes in shape, and the column center distance between the positioning columns is equal to the hole center distance between the positioning holes. The annular sealing element is arranged at the bottom of the hollow groove, so that the stress of the probe card during working is buffered,
Bibliography:Application Number: CN202023300421U