Spray nozzle cleaning device of spin coater and spin coater

The utility model belongs to the technical field of spin coater, and discloses a spin coater nozzle cleaning device and a spin coater, the spin coater nozzle cleaning device is provided with a liftable cleaning assembly, a spin coater nozzle extends into a shell from a probe inlet of the shell, then...

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Bibliographic Details
Main Authors WU JUEMIN, LU QIANJUN, ZHANG JIANQIAO, WU XIANYAN
Format Patent
LanguageChinese
English
Published 15.03.2022
Subjects
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
ATOMISING APPARATUS
NOZZLES
PERFORMING OPERATIONS
SPRAYING APPARATUS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
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Summary:The utility model belongs to the technical field of spin coater, and discloses a spin coater nozzle cleaning device and a spin coater, the spin coater nozzle cleaning device is provided with a liftable cleaning assembly, a spin coater nozzle extends into a shell from a probe inlet of the shell, then a cleaning liquid accommodating part is lifted up under the driving of a driving module, and the cleaning liquid accommodating part is driven by a driving module to rotate; the spin coater nozzle enters the opening cavity of the cleaning liquid containing part, the cleaning liquid is supplemented into the opening cavity through the cleaning liquid supplementing pipe, the spin coater nozzle can be immersed into the cleaning liquid, the size of the spin coater nozzle immersed into the cleaning liquid can be increased under the condition that a connecting pipe is short, and the cleaning size of the spin coater nozzle is enlarged; in the soaking process, disturbance gas is filled into the open cavity through the distu
Bibliography:Application Number: CN202122344028U