Semiconductor vacuum gate valve

• Main Authors: ZOU YAWEI, QI YING, ZHANG KUIBANG, CHEN LIN
• Format: Patent
• Language: Chinese; English
• Published: 11.02.2022
• Subjects: ACTUATING-FLOATS; BLASTING; COCKS; DEVICES FOR VENTING OR AERATING; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MECHANICAL ENGINEERING; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

The utility model discloses a semiconductor vacuum gate valve which comprises a valve body, a cover plate, a supporting frame, a driving mechanism, a valve rod and a valve plate. A valve opening is formed in the side wall of the valve body, the cover plate covers a top opening in the non-passage direction of the valve body in a sealing mode, the supporting frame is connected to the upper portion of the cover plate, and the driving mechanism is connected to the supporting frame. A through hole is formed in the cover plate, one end of the valve rod is connected with the output end of the driving mechanism, the other end of the valve rod penetrates through the through hole in the cover plate and extends into the inner cavity of the valve body, and the valve plate is used for sealing the valve opening; a corrugated pipe arranged on the periphery of the valve rod in a sleeving mode is connected between the valve rod and the cover plate in a sealed mode. In the process that the valve rod drives the valve plate to m