Silicon wafer basket and silicon wafer basket cleaning and circulating system

• Main Authors: CHEN RIQIANG, HAN SHILING, LI ZHAO, MA FEI
• Format: Patent
• Language: Chinese; English
• Published: 01.02.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model provides a silicon wafer basket and a silicon wafer basket cleaning and circulating system, and relates to the field of silicon wafer production. The silicon wafer basket comprises two end plates and a wafer inserting rod, each end plate is provided with at least two first hole units, each first hole unit comprises two hole groups, each hole group comprises at least two first holes arranged in the second direction, and the first holes are arranged in the first direction. The two groups of hole groups are arranged at two side ends of the end plates in the first direction in parallel and at intervals, a mounting gap for placing silicon wafers is formed between the two groups of hole groups, the wafer inserting rod is used for penetrating through the first hole and detachably connecting the two end plates, and the wafer inserting rod is provided with at least two slots which are arranged at intervals along the axial direction of the wafer inserting rod; therefore, the silicon wafer basket can a