Film plating machine vacuum chamber convenient to assemble

• Main Authors: LIU BO, SHEN GUANGYAN, MA XIQUAN, ZHU HONG, CHANG HAIRONG
• Format: Patent
• Language: Chinese; English
• Published: 18.01.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model relates to the technical field of coating machines, and provides a coating machine vacuum chamber convenient to assemble, which comprises a vacuum chamber main body, a vacuum pump and a joint, the joint is arranged at the bottom end of the right side of the vacuum chamber main body, a pipeline is inserted in the joint, the vacuum pump is arranged on one side of the pipeline, and protective structures are arranged on two sides of the vacuum chamber main body. An anti-falling structure is further arranged on the right side of the connector, assembling structures are arranged at the four corners of the bottom of the vacuum chamber body correspondingly, each assembling structure comprises a limiting block, a limiting groove, a fixing groove, a through groove, a fixing rod and a protruding block, and the limiting grooves are formed in the four corners of the bottom of the vacuum chamber body correspondingly. According to the vacuum chamber, the assembly structure is arranged, the limiting block a