Evaporation equipment

• Main Authors: ZHAO LI, LU YANCHUN, SUN JUNQI, SUN YUQUN, LIU FANGJUN
• Format: Patent
• Language: Chinese; English
• Published: 07.01.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The embodiment of the utility model discloses evaporation equipment, which is provided with an evaporation cavity and comprises an evaporation source and an evaporation pot, the evaporation source is arranged at the bottom of the evaporation cavity; wherein the number of the evaporation sources is at least two, the evaporation sources are arranged at intervals, and the distances between the evaporation sources and the center line of the evaporation cavity are equal; the evaporation pot is arranged at the top of the evaporation cavity, and the evaporation pot revolves around the center line in the evaporation cavity; wherein the single evaporation source is used for converting an evaporation material into a gas molecule evaporation material, and the gas molecule evaporation material moves in the evaporation cavity to form a single evaporation area; all the single evaporation areas form a total evaporation area, and the evaporation pots are correspondingly arranged in the total evaporation area. According to th