Piezoelectric MEMS microphone and electronic device

The utility model provides a piezoelectric MEMS microphone and an electronic device, and the microphone comprises a substrate which is internally provided with a sound cavity penetrating along the vertical direction; the substrate comprises a supporting body arranged in the sound cavity; the vibrati...

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Bibliographic Details
Main Authors XIAO YEHUI, GAO CHUANHAI, WU QINGQING, HUANG JINGZE
Format Patent
LanguageChinese
English
Published 21.12.2021
Subjects
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
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Summary:The utility model provides a piezoelectric MEMS microphone and an electronic device, and the microphone comprises a substrate which is internally provided with a sound cavity penetrating along the vertical direction; the substrate comprises a supporting body arranged in the sound cavity; the vibrating diaphragm is arranged above the sound cavity; the supporting body abuts against the vibrating diaphragm, and the vibrating diaphragm comprises two cantilever diaphragms extending towards the opposite sides of the supporting body. The cantilever film can vibrate relative to the supporting body, and then vibration strain is generated. Two piezoelectric laminated units; the two cantilever films correspond to each other; the piezoelectric lamination units are arranged on the corresponding cantilever films, the piezoelectric lamination units are used for generating electric signals according to the vibration strain of the corresponding cantilever films, and the vibrating diaphragms form a lever structure by taking th
Bibliography:Application Number: CN202121032620U