Pressure sensor

• Main Authors: XU KEYU, WU BIN
• Format: Patent
• Language: Chinese; English
• Published: 17.12.2021
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The utility model provides a pressure sensor, which comprises a glass base and a silicon strain diaphragm positioned on the glass base, one surface of the glass base is provided with a concave cavity, and the silicon strain diaphragm comprises an insulating medium layer positioned on the front surface and a silicon substrate covered by the insulating medium layer; a beam membrane structure of a cross beam structure is arranged at the position, facing the cavity, of the front face of the silicon strain membrane, each end of the beam membrane structure is provided with a set of piezoresistors, a set of heavily-doped contact areas and a pair of metal leads, the piezoresistors are connected with the heavily-doped contact areas in series, and the two ends of the piezoresistors are led out of the heavily-doped contact areas through the metal leads. The metal leads and the heavily doped contact regions form ohmic contact on the front surface of the silicon strain diaphragm, and Wheatstone bridges are formed among th