Slow lifting device for lifting basket and silicon wafer processing equipment

• Main Authors: KE GUOYING, ZUO GUOJUN, FU ZHENGCHAO
• Format: Patent
• Language: Chinese; English
• Published: 10.12.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model discloses a slow lifting device for lifting a flower basket and silicon wafer processing equipment. The slow lifting device for lifting the flower basket comprises a carrier, a bracket, a first transmission assembly, a second transmission assembly and a driving mechanism, the driving mechanism comprises a lifting driving mechanism and an adjusting driving mechanism; the lifting driving mechanism comprises a first driving element and a rotating wheel; the first transmission assembly and the second transmission assembly respectively comprise a connecting belt wound on the rotating wheel and a chain for pulling the carrier; the adjusting driving mechanism comprises an adjusting wheel, a second driving element for adjusting the distance between the adjusting wheel and the rotating wheel in the radial direction, and a fixed pulley block; and the first connecting belt bypasses the fixed pulley block. The carrier is lifted by driving the first transmission assembly and the second transmission assem