Large-area atomic-scale precision laser molecular beam epitaxial film preparation system

• Main Authors: GAO CHUNLEI, YE BIYING, HUANG HAIMING, WU SHIWEI, WANG WENBIN, YIN LIFENG, ZHU YINYAN, YU YANG, SHEN JIAN
• Format: Patent
• Language: Chinese; English
• Published: 20.03.2020
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CRYSTAL GROWTH; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

The utility model discloses a large-area atomic-scale precision laser molecular beam epitaxial film preparation system. The system comprises a rapid sample injection chamber, a main cavity, accessories of the main cavity, an excimer laser, a gas transmission assembly, a mechanical pump and a plurality of molecular pumps. According to the utility model, the two-axis stepping motor is used for controlling the total reflective mirror in the laser light path, modifying the oxygen pipe, the reflective high-energy electron diffractometer and the sample heating assembly in the system and redesigningthe sample holder and the sample support, so that uniform growth of large samples is realized. The sample prepared by the utility model has the advantages of large growth area, smooth surface, no particulate matters and consistent physical properties of each region. 本实用新型公开了一种大面积原子级精度激光分子束外延薄膜制备系统。本实用新型系统包括快速进样室、主腔及其配件、准分子激光器、气体传输组件、机械泵以及若干个分子泵。本实用新型通过利用二轴步进电机对激光光路中的全反镜进行控制，对系统中的氧气管、反射式高能电子衍射仪、样品加热组件进行修改以及对样品架、样品托重新设计，实现大