Neutral particle analysis system with mass and energy resolution capabilities

• Main Authors: YUAN GUOLIANG, ZANG LINGE
• Format: Patent
• Language: Chinese; English
• Published: 22.10.2019
• Subjects: MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; PHYSICS; TESTING

The utility model belongs to the field of high-temperature plasma diagnosis, and particularly relates to a neutral particle analysis system with mass and energy resolution capability, which comprisesa stripping cavity, an analysis module and a detector array, the stripping cavity adopts gas stripping, the analysis module adopts magnetic field analysis, and the detector array adopts a semiconductor detector with energy resolution capability; the detector array is fixed on the main vacuum wall and distributed on different deflection routes, and detector incident holes are aligned with analysismagnet slits; the magnet is fixed on the wall of the main vacuum chamber, two magnetic poles of the magnet are of planar structures, and a slit is reserved between the two magnetic poles, so that enough magnetic field strength is guaranteed, and ions can smoothly pass through; and the box body is fixed on the wall of the main vacuum chamber. Momentum analysis is carried out through a magnetic field, energy analysis is carr