Pressure sensor based on ceramic glass micro-melting process

• Main Authors: XING LIYANG, ZHOU ZHIMING
• Format: Patent
• Language: Chinese; English
• Published: 18.10.2019
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The utility model discloses a pressure sensor based on a ceramic glass micro-melting process. The sensor is composed of a pressure measuring port, a chip, a diaphragm, a signal processing circuit board and an electric connecting assembly, the chip is in bonding connection with the signal processing circuit board, and the sensor is characterized in that the diaphragm is a ceramic diaphragm, and thechip is connected with the ceramic diaphragm through a glass micro-melting process; according to the glass micro-melting process, the chip is sintered on the ceramic diaphragm through glass cement. The ceramic diaphragm is fixed on the metal base; the pressure measuring port is connected with the measured port in a sealing manner; the signal processing circuit board is a flexible circuit board ora hard circuit board. The sensor has the following advantages: (1) the pressure sensor adopting a glass micro-melting process has the advantages of high overall precision, good stability and the like; the ceramic diaphragm is