Tube orifice sealing structure of quartz furnace tube and quartz furnace tube

• Main Authors: QIAO YONG, HAN SHUGUO, SUN XIAN
• Format: Patent
• Language: Chinese; English
• Published: 12.07.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model belongs to the technical field of solar cell sheet manufacturing, and discloses a tube opening sealing structure of a quartz furnace tube and the quartz furnace tube, the tube opening sealing structure of the quartz furnace tube comprises a furnace door flange, a cooling ring and a sealing ring, the furnace door flange is connected to the periphery of a tube opening, and a cooling cavity is arranged in the cooling ring; and the sealing ring is sleeved on the periphery of the cooling ring and can be propped against the furnace door flange. According to the utility model, the cooling ring is connected to the periphery of the orifice of the furnace tube body; the cooling ring is arranged in the furnace tube body and sleeved with the sealing ring capable of abutting against the furnace door flange, the furnace tube body and the furnace door flange can be effectively sealed, the cooling ring directly cools the side, close to the furnace tube body, of the sealing ring, thetemperature of the area,