Difference double resonator type sound wave pressure sensor

• Main Authors: DOU SHAOXU, MOU XIAOJING, CHEN JUNFEI, SHANG ZHENGGUO
• Format: Patent
• Language: Chinese; English
• Published: 22.02.2019
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The utility model provides a difference double resonator type sound wave pressure sensor, it includes substrate 1 and the bottom electrode 2 that forms above that, is provided with two independences and the same opening or the hermetic cavity room of structural parameters in the substrate of bottom electrode 2 times 1, is formed with piezoelectric layer 3 and first syntonizer 4 on the bottom electrode on the first cavity 2 in proper order, is formed with piezoelectric layer 3 and second syntonizer 5 on the bottom electrode on the second cavity 2 in proper order. The utility model discloses aninfluence of temperature fluctuations to the syntonizer has been eliminated, the sensitivity that has improved pressure sensor. 本实用新型提出了种差分双谐振器型声波压力传感器，其包括衬底1及在其上形成的底电极2，在底电极2下的衬底1内设置有两个独立且结构参数相同的敞开或密封的腔室，第腔室之上的底电极2上依次形成有压电层3和第谐振器4，第二腔室之上的底电极2上依次形成有压电层3和第二谐振器5。本实用新型通过消除了温度波动对谐振器的影响，提高了压力传感器的灵敏度。