Novel unbiased of multilayer formula is to ceramic for electronic component sputter tool

• Main Authors: LIN ZHONGGENG, CHEN LIANJIN
• Format: Patent
• Language: Chinese; English
• Published: 12.10.2018
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model provides a novel unbiased of multilayer formula is to ceramic for electronic component sputter tool, it is including two tools placing from top to bottom, if the tool inboard is equipped with the dry processing recess, tool outside bottom corresponds if the dry processing recess is equipped with direct hole, the pottery electronic component place in the processing recess of tool,ceramic electronic component is tightly fixed to two inboard laminating of processing recess mirror image and clamps of tool, the unbiased of multilayer formula to ceramic for the electronic component sputter tool further include retention plate, retention plate is the sheet structure, retention plate is equipped with reach through hole a plurality of and processing groove position one -to -one,the tolerance of reach through hole is less than the tolerance of processing the recess, retention plate places between two tools, and two tools are decided with retention plate laminating and clamp fastening. The utility mode