Magnetic control means and physical vapor deposition equipment

• Main Authors: YUAN YUAN, LIN ZONGXIAN
• Format: Patent
• Language: Chinese; English
• Published: 14.08.2018
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model relates to a magnetic control means and physical vapor deposition equipment, magnetic control means includes: the chamber holds, be located the magnetic control component that holdsthe intracavity, corrosion resistant coating covers magnetic control component surface. This kind of corrosion resistant coating can prevent the magnetic control component and hold the intracavity wall to be corroded by the coolant liquid to reduce the production of impurity, reduce the consumption of filter. 本实用新型涉及种磁控装置和物理气相沉积设备，所述磁控装置包括：容纳腔；位于所述容纳腔内的磁控元件；耐腐蚀涂层，覆盖所述磁控元件表面。这种耐腐蚀涂层能够防止磁控元件和容纳腔内壁被冷却液腐蚀，从而减少杂质的产生，降低过滤器的消耗。