Graphical substrate of cross terrace with edge

• Main Authors: YANG WEIJIA, TANG XIUFENG, LIU JUNJIE, LIU MINGQUAN, ZHAO ZHICHENG, LIU JUNYAN, HE XIN
• Format: Patent
• Language: Chinese; English
• Published: 27.07.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The utility model provides a graphical substrate of cross terrace with edge, including substrate bottom and the cross terrace with edge pattern that stacks gradually from lower to upper, is the diameter of cross terrace with edge pattern 500 is 950nm highly 150 500nm. The graphical sapphire substrate of cross terrace with edge of preparation can promote the crossgrowth of film, is favorable to thefilm of the low defect of follow -up growth high quality, can increase substantially LED's luminous efficacy, thereby the graphical substrate of cross terrace with edge of preparation can increase the luminous efficiency that the reflection of light improves LED, LD device. 本实用新型提供了种十字棱台图形化衬底，包括由下往上依次层叠的衬底底部和十字棱台图案，所述十字棱台图案的直径为500-950nm，高度为150-500nm。制备的十字棱台图形化蓝宝石衬底，能够促进薄膜的横向生长，有利于后续生长高质量低缺陷的薄膜，可大幅度提高LED的发光效率；制备的十字棱台图形化衬底能够增加光的反射从而提高LED、LD器件的出光效率。