Graphite boat silicon chip is suction means in batches

• Main Authors: JIA YUPENG, ZHANG JIANWEI, DAI JUN, ZHANG XUEQIANG
• Format: Patent
• Language: Chinese; English
• Published: 16.03.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The utility model discloses a graphite boat silicon chip is suction means in batches, include: the sucking disc subassembly, and be used for the fixed fastening components of sucking disc subassemblylocking, wherein, the sucking disc subassembly includes a plurality of sucking discs, two slice adjacent sucking discs are parallel to each other and the keep (shenglvehao)at a certain distance away is located absorption space between the two with formation. According to the utility model discloses, it can realize the batch silicon chip in the silicon chip transfer process and draw, and the sucking disc that can disappear simultaneously to the damage that the fish tail and the oppression on silicon chip surface led to the fact, has improved the yield when having improved production efficiency. 本实用新型公开了种石墨舟硅片批量吸取装置，包括：吸盘组件；以及用于将吸盘组件锁紧固定的紧固组件，其中，吸盘组件包括若干片吸盘，相邻两片吸盘相互平行且间隔定距离以形成位于两者之间的吸取空间。根据本实用新型，其可实现硅片转移过程中的批量硅片吸取，同时能消吸盘对硅片表面的划伤及压迫造成的损坏，提高了生产效率的同时提高了成品率。