Substrate processing system

The utility model relates to a substrate processing system, substrate processing system includes: grinding portion, it carries out chemical mechanical polishing (CMP) technology to the base plate, the cleaning part, its base plate to accomplishing lapping process washs, base plate horizontal conveyi...

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Bibliographic Details
Main Authors NOH JIN-SUNG, AN JUN-HO
Format Patent
LanguageChinese
English
Published 03.10.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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