Packaging structure of pressure sensor

• Main Authors: DAI XUANLONG, JI QINGXIAO, CHANG WEI, REN WANWEI, FU JUN
• Format: Patent
• Language: Chinese; English
• Published: 03.10.2017
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The utility model discloses a packaging structure of pressure sensor, including sensor and encapsulation shell, the sensor includes the pressure core, the pressure core includes base and sensitive piece, forms first spacing step between base upper portion and base lower part, casing upper portion has the holding chamber of placing the pressure core, and the casing lower part is hollow structure, through the intercommunicating pore intercommunication between casing upper portion and the casing lower part, form the spacing step of second between upper portion cavity and lower part cavity, form the round clearance between upper portion cavity and the base upper portion, fill out in the clearance and be equipped with sealed filling layer to guarantee the leakproofness between pressure core and the encapsulation shell, the filling layer adopts the sinter layer, braze layer or weld layer, and cavity of formation between the base lower part of pressure core and the encapsulation shell communicates with each other th