Wireless vibration sensor of MOEMS based on pectination grid

• Main Authors: SUI QINGMEI, JIANG SHANCHAO, WANG JING, TIAN CHANGBIN, XIANG LIWEI, LI YIJIA
• Format: Patent
• Language: Chinese; English
• Published: 25.08.2017
• Subjects: MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; PHYSICS; SIGNALLING; TESTING; TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILARSIGNALS

The utility model discloses a wireless vibration sensor of MOEMS based on pectination grid, include: the sensor housing, miniature optical source pass through transmission fiber and vibrate sensitive source to be connected the both sides that vibrate sensitive source are fixed with the collimater respectively, the output that vibrates sensitive source passes through transmission fiber to be connected with the photoelectric conversion module, and the photoelectric conversion module connects gradually with data analysis module, wireless transmission module. The utility model discloses beneficial effect: this kind of structural design makes it only need carry out effectual contact with sensor and testee in the monitoring to the wireless transmission function of detected signal is effectual has overcome in the monitoring of large -scale engineering structure such as tunnel, bridge sensor arrange and the go between current situation of difficulty. 本实用新型公开了种基于梳状栅格的MOEMS无线振动传感器，包括：传感器外壳，微型光源通过传输光纤与振动敏感源连接，在所述振动敏感源的两