Semiconductor manufacturing equipment

• Main Authors: GU CHENZHONG, WANG DUXIANG, MA ZHIBANG, WU CHAO, SONG CHAO, LIU LONG, PAN GUANFU, WU CHAOYU
• Format: Patent
• Language: Chinese; English
• Published: 28.09.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model provides a: a semiconductor manufacturing equipment, includes: the working chamber has an opening at least, transported gas device, output high cleanliness is gaseous, and the opening part of working chamber forms the gas curtain, block that external dust gets into the working chamber inside, the gaseous cleanliness factor of high cleanliness is higher than or equals gaseous cleanliness factor among the desired operational environment of the machine normal during operation of equipment. 本实用新型提供了：种半导体制造设备，包括：工作腔，至少具有个开口；输气装置，输出高洁净度气体，并在所述工作腔的开口处形成气帘，阻挡外界粉尘进入工作腔内部，所述高洁净度气体的洁净度高于或等于所述机设备正常工作时所要求的工作环境中气体的洁净度。