Vacuum coating cooling device

• Main Authors: XING XUNYONG, LI CHANGXING, QIAN YAJIE, MENG GUOQIANG, LIU JUNLIN, LI WEI, WANG NAIYONG, SU YANXIAN, HAN SHEN, TIAN LI
• Format: Patent
• Language: Chinese; English
• Published: 22.06.2016
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model relates to a foamed metal production field, in particular to vacuum coating cooling device. This vacuum coating cooling device, including the casing, the casing is equipped with the flange from top to bottom respectively, last relative negative pole target and the cooling device of N group that be equipped with of shells inner wall, cooling device links to each other with the circulating pipe, and the negative pole target links to each other with the sputter power of establishing at the casing outer wall, cooling device is connected with the sealing chamber, and this sealing chamber is fixed on shells inner wall, sputter powers etc. Are through the control of PCL controller. The utility model discloses a coating film region provides good temperature environment, and its membrane core temperature is controllable at - 10 DEG C ~80 DEG C within ranges, the utility model discloses cooling body and membrane core fully contact, utilize coolant in the cooling body heat on with membrane core to take