Device of air current protection wet etching diffusing surface
The utility model discloses a device of air current protection wet etching diffusing surface, it includes: sculpture machine, sculpture cell body, silicon chip, gyro wheel, corrosive liquid liquid level, air pump, blast pipe, gas pocket, air exhauster, suction opening and exhaust column, the blast p...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
02.12.2015
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Subjects | |
Online Access | Get full text |
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Summary: | The utility model discloses a device of air current protection wet etching diffusing surface, it includes: sculpture machine, sculpture cell body, silicon chip, gyro wheel, corrosive liquid liquid level, air pump, blast pipe, gas pocket, air exhauster, suction opening and exhaust column, the blast pipe lie in the top of silicon chip, be equipped with an exhaust hole on the blast pipe, blast pipe and air pump link to each other, the department is equipped with the suction opening in the middle of sculpture machine and the sculpture cell body, it is continuous with the air exhauster that the suction opening passes through the exhaust column, through the adoption the utility model discloses, the realization utilizes the air current at the surperficial protective layer that forms of silicon chip, to the unnecessary sculpture region of diffusing surface production, increases effective photic area that PN tied in the present wet etching technology of reduction, improves photoelectric conversion efficiency, increase battery efficiency. |
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Bibliography: | Application Number: CN20152506417U |