Retrieve device of hydrogen among follow silicon epitaxy stove vented tail gas

• Main Authors: GAO SONG, QIU CHANGCHUN, YU YANG, LIU WANNAN, CONG WEIJUN, ZHAO LIN, LE YUN
• Format: Patent
• Language: English
• Published: 14.10.2015
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

The utility model provides a retrieve device of hydrogen among follow silicon epitaxy stove vented tail gas, including water wash column, front buffer jar, smart dechlorination tower, remove dust water filter, hydrogen compressor, the deareator who loops through the pipeline polyphone, rearmounted buffer tank, PSA piece -rate system, catalytic deoxidization tower, water chiller, adsorption dry tower, terminal adsorption tower, terminal water chiller, be equipped with silicon epitaxy vented tail gas's entry on the water wash column. Use above -mentioned device can with relict microimpurity desorption in the hydrogen to obtaining high -purity hydrogen below 99.99999%, can make the product hydrogen purity that the gained arrived reach 99.9%-99.99999%, the rate of recovery can be up to 95%. Chlorine in the remaining impurity, oxygen, silane etc. Can hang down respectively to 1 10 -8 to can the nimble regulation according to the purity requirement of product. The utility model discloses a specially adapted separates and retrieves hydrogen in following the unloading waste gas in the silicon epitaxy production process, has very good economic benefits, environmental protection profit.