Illumination pack mirror is reined in to dark purple outer high numerical aperture branch of academic or vocational study of 248nm

• Main Authors: WANG HEQUN, LI WEI, LI SHI, LI QI, GAO SITIAN, SHI YUSHU
• Format: Patent
• Language: English
• Published: 16.09.2015
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The utility model provides an illumination pack mirror is reined in to dark purple outer high numerical aperture branch of academic or vocational study of 248nm, includes anterior relaying shotgroup and the rear portion formation of image shotgroup of the same optical axis of disposed on, it is the first to third battery of lens one -tenth that the front portion relaying shotgroup sets gradually around by, fourth to the 12nd battery of lens one -tenth that formation of image shotgroup in the rear portion set gradually around by, wherein the 12nd lenses are the parallel plate lens, are used for supporting the detected sample outside dark purple in the light passing through, the two shotgroup is installed in constant temperature sealing sleeve, and each lens is installed in the lenses frame that corresponds. The utility model discloses a style illumination design is reined in to high numerical aperture's the branch of academic or vocational study, has brightness uniformity, introduces the light source spurious image, optimizes the aberration, restraines the advantage of stray light, and high numerical aperture has guaranteed very high resolving power. This device can produce clear wire -frame image to the 100nm live width under the verification ultraviolet microscope, is applicable to the detection illumination of the crucial size of integrated circuit mask version, nanometer geometry grid and MEMSNEMS device.