Mate charged particle photographic means that line is parallel beam

• Main Authors: ZHANG XIAODING, SHI JINSHUI, WEI TAO, YANG GUOJUN, LI YIDING, ZHANG ZHUO, JIANG XIAOGUO
• Format: Patent
• Language: English
• Published: 16.09.2015
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The utility model discloses a mate charged particle photographic means that line is parallel beam, including beam transport line and optical imaging structure, the beam transport solenoid is drawn together and is centrosymmetric anterior segment quadrupole magnet group and back end quadrupole magnet group, optical imaging configuration bit in the end of beam transport line, and wherein anterior segment quadrupole magnet group identical and all include and gos back the centrosymmetric 1 collimater by four identical quadrupole magnet on the central symmetry point of anterior segment quadrupole magnet group and back end quadrupole magnet group with back end quadrupole magnet in group form, transmission matrix adoption quadravalence matrix M that anterior segment quadrupole magnet organized: quadravalence matrix M does for satisfying parallel beam incident condition: M11=0, M22=0, M33=0, M44=0's quadravalence transmission matrix to the line and the row at the element place are showed respectively to preceding, the back suffix that go up matrix element. The utility model adopts the above structure, adopt point -to -point formation of image, it is the parallel beam just to mate the line, can overcome the blurred drawback of pointolite photographic image, improves photographic resolution ratio.