Installation location frock of double -deck manipulator
The utility model provides a complexity that installation location frock of double -deck manipulator can not only realize the installation of double -deck manipulator front end finger and the integral type operation of leveling, and reduce the whole maintenance time of equipment and reduced level ad...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
09.09.2015
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Subjects | |
Online Access | Get full text |
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Summary: | The utility model provides a complexity that installation location frock of double -deck manipulator can not only realize the installation of double -deck manipulator front end finger and the integral type operation of leveling, and reduce the whole maintenance time of equipment and reduced level adjustment. Its structure includes: the locating hole of installation location base plate, manipulator lower floor front end finger, the locating hole of manipulator upper strata front end finger, wherein installation location base plate is symmetrical structure for lower floor's front end finger is attend to the location manipulator, and the accuracy of the locating hole of the locating hole of manipulator lower floor front end finger, manipulator upper strata front end finger relies on machining NULL totally. The utility model discloses it is rational in infrastructure, utilize the symmetry and the locating hole structure of installation location base plate to realize installation and location to double -deck manipulator, do not need to go again to adjust the levelness of mechanical hand front end finger after the installation, shortened the level adjustment time to whole equipment. This frock is applicable to the both arms structure of double -deck manipulator for bilateral symmetry. But wide application in the manufacturing and the application technique field of semiconductor coating equipment. |
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Bibliography: | Application Number: CN20152217190U |