Shake collimation device of mirror subassembly of Z axle, Z axle shake mirror subassembly and collimation system

• Main Authors: YANG ZHAOHUI, TAN TAO, GAO YUNFENG, ZHAI XUETAO, CHEN GUODONG, LYU HONGJIE, SU PEILIN
• Format: Patent
• Language: English
• Published: 12.08.2015
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

The utility model relates to a shake collimation device of mirror subassembly of Z axle, Z axle shake mirror subassembly and collimation system. The shake collimation device of mirror subassembly of this Z axle including the laser instrument of arranging in proper order, collimation beam expanding lens, first collimation diaphragm, second collimation diaphragm and facula position locater, and has between first collimation diaphragm and the second collimation diaphragm and is used for installing the shake installation space of mirror subassembly of Z axle, wherein, first collimation diaphragm and the central collineation of the physics light path of second collimation diaphragm to physics light path center be the Z axle in the three-dimensional rectangular coordinate system, and the laser instrument can be respectively moves along X axle and Y axle orientation, and the collimation beam expanding lens can be respectively moves along X axle and Y axle orientation, facula position locater can be respectively along X axle and the removal of Y axle orientation the collimation device that above-mentioned Z axle shakes the mirror subassembly has better collimation effect and can standardize.