Double precision weighing device for sapphire furnace

The utility model provides a double precision weighing device for a sapphire furnace. The double precision weighing device comprises a vacuum chamber, a seed crystal shaft, a seed crystal shaft base, a bellows and a sliding seat. The double precision weighing device further comprises an upper weighi...

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Bibliographic Details
Main Authors WU HAIJUN, SHI GANG, LIU TONGQING
Format Patent
LanguageEnglish
Published 03.06.2015
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Summary:The utility model provides a double precision weighing device for a sapphire furnace. The double precision weighing device comprises a vacuum chamber, a seed crystal shaft, a seed crystal shaft base, a bellows and a sliding seat. The double precision weighing device further comprises an upper weighing sensor and a lower weighing sensor which are arranged on the two sides of the seed crystal shaft base. The precision of the upper weighing sensor is higher than that of the lower weighing sensor, and the range of the upper weighing sensor is smaller than that of the lower weighing sensor. The two weighing sensors are adopted to measure the crystal weight in the crystal growth process, the high precision and large range requirements in the crystal growth process can be met simultaneously, and the reliable guarantee is provided for accurately mastering crystal weight variations and adopting appropriate crystal growth control means.
Bibliography:Application Number: CN20142803482U